Structural, chemical and optical properties of cerium dioxide film prepared by atomic layer deposition on TiN and Si substrates

Published 2017 View Full Article

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Title
Structural, chemical and optical properties of cerium dioxide film prepared by atomic layer deposition on TiN and Si substrates
Authors
Keywords
Atomic layer deposition, Ceria microstructure, Grain size, X-ray diffraction, Atomic force microscopy, Secondary ion mass spectroscopy, X-ray photo-electron spectroscopy, Spectroscopic ellipsometry
Journal
THIN SOLID FILMS
Volume 636, Issue -, Pages 78-84
Publisher
Elsevier BV
Online
2017-05-25
DOI
10.1016/j.tsf.2017.05.034

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