Structural, chemical and optical properties of cerium dioxide film prepared by atomic layer deposition on TiN and Si substrates

出版年份 2017 全文链接

标题

作者

关键词

Atomic layer deposition, Ceria microstructure, Grain size, X-ray diffraction, Atomic force microscopy, Secondary ion mass spectroscopy, X-ray photo-electron spectroscopy, Spectroscopic ellipsometry

出版物

THIN SOLID FILMS

Volume 636, Issue -, Pages 78-84

出版商

Elsevier BV

发表日期

2017-05-25

DOI

10.1016/j.tsf.2017.05.034

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