Oxygen diffusion in TiO 2 films studied by electron and ion Rutherford backscattering

Published 2017 View Full Article

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Title
Oxygen diffusion in TiO 2 films studied by electron and ion Rutherford backscattering
Authors
Keywords
Diffusion, RBS, Electron-RBS
Journal
THIN SOLID FILMS
Volume 629, Issue -, Pages 97-102
Publisher
Elsevier BV
Online
2017-03-19
DOI
10.1016/j.tsf.2017.03.024

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