Oxygen diffusion in TiO 2 films studied by electron and ion Rutherford backscattering

出版年份 2017 全文链接

标题

Oxygen diffusion in TiO 2 films studied by electron and ion Rutherford backscattering

作者

关键词

Diffusion, RBS, Electron-RBS

出版物

THIN SOLID FILMS

Volume 629, Issue -, Pages 97-102

出版商

Elsevier BV

发表日期

2017-03-19

DOI

10.1016/j.tsf.2017.03.024

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