Mechanical studies of thermally annealed nc -W 2 N embedded a -Si 3 N 4 nanocomposite films

Published 2017 View Full Article

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Title
Mechanical studies of thermally annealed nc -W 2 N embedded a -Si 3 N 4 nanocomposite films
Authors
Keywords
Thin film, Magnetron sputtering, Nitride, Annealing, Nanocomposite, Hardness
Journal
THIN SOLID FILMS
Volume 636, Issue -, Pages 93-98
Publisher
Elsevier BV
Online
2017-05-29
DOI
10.1016/j.tsf.2017.05.037

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