Mechanical studies of thermally annealed nc -W 2 N embedded a -Si 3 N 4 nanocomposite films

出版年份 2017 全文链接

标题

作者

关键词

Thin film, Magnetron sputtering, Nitride, Annealing, Nanocomposite, Hardness

出版物

THIN SOLID FILMS

Volume 636, Issue -, Pages 93-98

出版商

Elsevier BV

发表日期

2017-05-29

DOI

10.1016/j.tsf.2017.05.037

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