High-rate deposition of thick (Cr,Al)ON coatings by high speed physical vapor deposition

Published 2017 View Full Article

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Title
High-rate deposition of thick (Cr,Al)ON coatings by high speed physical vapor deposition
Authors
Keywords
CrAlON, High speed PVD, Hollow cathode discharge, Thick PVD coatings, Oxidation protection, Inter-diffusion
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 322, Issue -, Pages 152-162
Publisher
Elsevier BV
Online
2017-05-13
DOI
10.1016/j.surfcoat.2017.05.034

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