The improvement of oxidation resistance, mechanical and tribological properties of W 2 N films by doping silicon

Title
The improvement of oxidation resistance, mechanical and tribological properties of W 2 N films by doping silicon
Authors
Keywords
Reactive magnetron sputtering, W-Si-N films, Oxidation resistance, Mechanical and tribological properties
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 317, Issue -, Pages 158-165
Publisher
Elsevier BV
Online
2017-03-28
DOI
10.1016/j.surfcoat.2017.03.058

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