The microstructure and tribological properties at elevated temperatures of tungsten silicon nitride films

Title
The microstructure and tribological properties at elevated temperatures of tungsten silicon nitride films
Authors
Keywords
Reactive magnetron sputtering, W-Si-N films, Tribological properties, Testing temperatures
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 326, Issue -, Pages 255-263
Publisher
Elsevier BV
Online
2017-07-28
DOI
10.1016/j.surfcoat.2017.07.060

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