The enhancement of fracture toughness and tribological properties of the titanium nitride films by doping yttrium

Title
The enhancement of fracture toughness and tribological properties of the titanium nitride films by doping yttrium
Authors
Keywords
Reactive magnetron sputtering, Ti, Y, O, N films, Fracture toughness, Tribological properties
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 321, Issue -, Pages 57-63
Publisher
Elsevier BV
Online
2017-04-25
DOI
10.1016/j.surfcoat.2017.04.053

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