Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self-bias

Published 2017 View Full Article

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Title
Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self-bias
Authors
Keywords
Carbon coatings, Silicon, Optical properties, Density, Raman spectroscopy
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 329, Issue -, Pages 212-217
Publisher
Elsevier BV
Online
2017-09-21
DOI
10.1016/j.surfcoat.2017.09.044

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