Nano-scratch testing of (Ti,Fe)N x thin films on silicon

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Title
Nano-scratch testing of (Ti,Fe)N x thin films on silicon
Authors
Keywords
Crack resistance, Protective coatings, Nano-scratch, Soft inclusions, H, /, E
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 309, Issue -, Pages 671-679
Publisher
Elsevier BV
Online
2016-11-09
DOI
10.1016/j.surfcoat.2016.11.024

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