Neutral beam process in AlGaN/GaN HEMTs: Impact on current collapse

Published 2017 View Full Article

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Title
Neutral beam process in AlGaN/GaN HEMTs: Impact on current collapse
Authors
Keywords
Neutral beam, GaN, Gate recess, Current collapse, HEMTs
Journal
SOLID-STATE ELECTRONICS
Volume 137, Issue -, Pages 1-5
Publisher
Elsevier BV
Online
2017-07-27
DOI
10.1016/j.sse.2017.07.015

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