In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
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Title
In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
Authors
Keywords
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Journal
Nature Photonics
Volume 11, Issue 10, Pages 639-645
Publisher
Springer Nature
Online
2017-09-18
DOI
10.1038/s41566-017-0004-4
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