In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
出版年份 2017 全文链接
标题
In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
作者
关键词
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出版物
Nature Photonics
Volume 11, Issue 10, Pages 639-645
出版商
Springer Nature
发表日期
2017-09-18
DOI
10.1038/s41566-017-0004-4
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