Film thickness effect on fractality of tin-doped In2O3 thin films

Title
Film thickness effect on fractality of tin-doped In2O3 thin films
Authors
Keywords
atomic force microscopy, electron beam deposition method, indium tin oxide, multifractal analysis, surface roughness, thin film
Journal
Electronic Materials Letters
Volume 11, Issue 5, Pages 749-757
Publisher
Springer Nature
Online
2015-09-10
DOI
10.1007/s13391-015-4280-1

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