Article
Chemistry, Analytical
Sangeetha Hari, P. H. F. Trompenaars, J. J. L. Mulders, Pieter Kruit, C. W. Hagen
Summary: This study demonstrates the use of focused electron beam-induced etching (FEBIE) as a direct-write technique for removing carbonaceous interconnecting material in high resolution dense lines. Secondary electron imaging and atomic force microscopy measurements were used to monitor the FEBIE process, confirming the successful fabrication of well-separated FEBID lines. The application of this technique for removing interconnecting material in dense lines was further validated using backscattered electron imaging.
Article
Nanoscience & Nanotechnology
Shan Wu, Ding Zhao, Min Qiu
Summary: This research demonstrates the potential of developing electron-beam lithography (EBL) into a controllable 3D nanoprinting technology using ice resists, and flexible control of printed layer thickness can be achieved through mixed ice resists. Additionally, the prospect of printing metals is promising by employing organometallic compounds as ice resists.
ACS APPLIED MATERIALS & INTERFACES
(2022)
Article
Nanoscience & Nanotechnology
Daqian Si, Zhihao Zhang, Zhiqiang Wang, Yinci Chen, Xu Gao, Bo Da, Hongxuan Guo, Litao Sun
Summary: In this study, nanopatterned hydrogels were fabricated using a scanning electron microscope. The distribution of electron scattering to induce hydrogel cross-linking was analyzed through an optimized Monte Carlo simulation with Pearson correlation coefficient analysis. The study found that the feature size of poly(ethylene glycol) diacrylate hydrogel was approximately 280 nm under certain conditions. This research provides a solution for the miniaturized preparation of nanohydrogels, which can enhance the density of arrays in nanosensors.
ACS APPLIED NANO MATERIALS
(2023)
Article
Chemistry, Multidisciplinary
Jakub Jurczyk, Lex Pillatsch, Luisa Berger, Agnieszka Priebe, Katarzyna Madajska, Czeslaw Kapusta, Iwona B. Szymanska, Johann Michler, Ivo Utke
Summary: This study developed a method called focused-electron-beam-induced mass spectrometry (FEBiMS) for analyzing the fragmentation products of metalorganic compounds under electron irradiation. The results showed that FEBiMS is capable of investigating the fragmentation process of electron-sensitive materials within the energy range of scanning electron microscopes and has potential applications in studying fundamental and process parameters in various nanotechnology fields.
Article
Chemistry, Analytical
Zhifu Feng, Damiano Giubertoni, Alessandro Cian, Matteo Valt, Mario Barozzi, Andrea Gaiardo, Vincenzo Guidi
Summary: In this study, a new method combining electron beam lithography (EBL) and focused ion beam (FIB) technologies is proposed to achieve low power consumption in MOS gas sensors. The miniaturization of the hotplate geometry is realized using this method, reducing power consumption effectively. The effectiveness and feasibility of this method are demonstrated through characterization and testing.
Article
Nanoscience & Nanotechnology
Anshuman Cherala, Parth N. Pandya, Kenneth M. Liechti, S. V. Sreenivasan
Summary: Emerging nanoscale applications in energy, electronics, optics, and medicine can benefit from incorporating nanoshaped structures with sharp corners. By utilizing nanoimprint lithography followed by metal-assisted chemical etching, diamond-like nanoshapes have been shown to improve device performance. Studies suggest that scaling nanoshaped imprinting down to sub-10 nm levels is achievable with improved resist materials and novel bridge structures.
MICROSYSTEMS & NANOENGINEERING
(2021)
Article
Chemistry, Multidisciplinary
Rui Zheng, Ding Zhao, Yihan Lu, Shan Wu, Guangnan Yao, Dongli Liu, Min Qiu
Summary: This article introduces a method that uses sprayed anisole as ink and a focused electron-beam as a pen to record information on a cooled substrate. By utilizing discrete dose distribution, structures with sub-10 nm accuracy can be written. Furthermore, this method allows for nanoscale painting and can be applied to store information on various surfaces.
ADVANCED FUNCTIONAL MATERIALS
(2022)
Article
Chemistry, Multidisciplinary
David Salamon, Kristyna Bukvisova, Vit Jan, Michal Potocek, Jan Cechal
Summary: This study demonstrates the mass transport characteristics of the natural VOC isoprene on surfaces, which can quickly fill low-concentration areas at a fast speed, providing a stable flow of resource material for focused electron beam synthesis. This has significant implications for nanofabrication.
COMMUNICATIONS CHEMISTRY
(2023)
Article
Chemistry, Multidisciplinary
Tao Liu, Xujie Tong, Shuoqiu Tian, Yuying Xie, Mingsai Zhu, Bo Feng, Xiaohang Pan, Rui Zheng, Shan Wu, Ding Zhao, Yifang Chen, Bingrui Lu, Min Qiu
Summary: Ice lithography is a promising technology in nanotechnology, however, its theoretical modeling and understanding are still limited. In this study, a Monte Carlo algorithm-based modeling method for ice lithography is developed and simulations are performed. The comparisons with conventional electron beam lithography show the superior properties of ice lithography.
Article
Physics, Fluids & Plasmas
B. L. Zhu, S. Q. Yan, Y. Chen, X. D. Zhu
Summary: The properties of Ar plasma generated by electron beam passing through a diamond film window were investigated by experimental diagnostic and Monte Carlo simulation. It was found that the plasma light emission intensity increases with the electron beam current, while the plasma shape remains unchanged. The plasma shrinks and becomes brighter with increasing gas pressure, and its shape changes from cone-shaped to semi prolate spheroid. The electron density also increases with increasing gas pressure and electron current.
PLASMA SOURCES SCIENCE & TECHNOLOGY
(2022)
Review
Chemistry, Multidisciplinary
Ping Li, Siyu Chen, Houfu Dai, Zhengmei Yang, Zhiquan Chen, Yasi Wang, Yiqin Chen, Wenqiang Peng, Wubin Shan, Huigao Duan
Summary: The article systematically summarizes and analyzes various factors related to FIB nanofabrication for the fabrication of 3D nanostructures and devices, including mechanisms, instruments, processes, and typical applications. Additionally, it highlights the current challenges and future development trends in the field of FIB nanofabrication.
Article
Nanoscience & Nanotechnology
Yihan Lu, Binbin Jin, Rui Zheng, Shan Wu, Ding Zhao, Min Qiu
Summary: In this study, it was discovered that aromatic molecules can be directly converted into nanostructures containing graphene quantum dots (GQDs) using cryogenic electron-beam writing, resulting in even red fluorescence emission. The photoluminescence intensity of the product can be easily controlled by adjusting the electron-beam exposure dose. Experimental analysis revealed a carbonization and graphitization process of the aromatic molecules during e-beam irradiation. This one-step method for production and patterning of GQDs enables their application in highly integrated and compact optoelectronic devices.
ACS APPLIED MATERIALS & INTERFACES
(2023)
Article
Engineering, Electrical & Electronic
Gemma Chapman, Mateus G. Masteghin, David C. Cox, Steven K. Clowes
Summary: This study presents the material and electrical properties of silicon dioxide insulators formed with a focused electron beam using TEOS or TMCTS precursors. It was found that the TEOS precursor produced a purer dielectric with a reduced carbon percentage, while the TMCTS precursor required an additional water vapor supply to suppress the carbon content. The resulting insulators from both precursors exhibited similar electrical properties.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2022)
Article
Physics, Applied
Eugenia Pyurbeeva, Jacob L. Swett, Qingyu Ye, Oscar W. Kennedy, Jan A. Mol
Summary: Feedback-controlled electric breakdown of graphene can be applied to encapsulated graphene constrictions, resulting in conductance switching behavior attributed to atomic-scale fluctuations of graphene below the encapsulating layer. This method opens up possibilities for fabricating encapsulated room-temperature single-electron nanodevices and provides insights into the physical mechanism of conductance switching in graphene nanodevices.
APPLIED PHYSICS LETTERS
(2021)
Article
Engineering, Biomedical
Mahya Ganjian, Khashayar Modaresifar, Dionysios Rompolas, Lidy E. E. Fratila-Apachitei, Amir A. A. Zadpoor
Summary: Developing a high-throughput nanopatterning technique with precise control over feature dimensions is crucial for studying cell-nanopattern interactions. This study presents a process that fulfills these criteria by using electron-beam lithography to fabricate controlled arrays of submicron pillars and developing etching procedures to create the desired height. The study demonstrates the significance of the fabricated pillars in inducing osteogenic differentiation and utilizes replication techniques to pattern bio-instructive surfaces. Overall, the method enables the precise fabrication of submicron and nanopatterns for systematic cell studies.
ACTA BIOMATERIALIA
(2022)
Article
Energy & Fuels
Ya-Rong Zheng, Jerome Vernieres, Zhenbin Wang, Ke Zhang, Degenhart Hochfilzer, Kevin Krempl, Ting-Wei Liao, Francesco Presel, Thomas Altantzis, Jarmo Fatermans, Soren Bertelsen Scott, Niklas Morch Secher, Choongman Moon, Pei Liu, Sara Bals, Sandra Van Aert, Ang Cao, Megha Anand, Jens K. Norskov, Jakob Kibsgaard, Ib Chorkendorff
Summary: This study presents a low-iridium mass-selected iridium-tantalum oxide catalyst with high intrinsic activity for acid environments, aiming to improve the efficiency of hydrogen production in water electrolysers. By carefully evaluating oxygen production, the researchers demonstrate that the catalyst exhibits higher activity compared to commercial IrO2.
Article
Chemistry, Physical
Radhika G. Rao, Raoul Blume, Mark T. Greiner, Pei Liu, Thomas W. Hansen, Kathleen S. Dreyer, David D. Hibbitts, Jean-Philippe Tessonnier
Summary: In this study, we demonstrate that carbons exhibit EMSI effects, which can enhance the catalytic activity of metals by controlling the surface chemistry. This finding contributes to a better understanding of the role of carbon materials in catalysis and provides new approaches for optimizing catalyst design.
Article
Chemistry, Physical
Yalong Zhai, Xuewei Yang, Shu-Na Zhao, Pei Liu, Jun Lin, Yang Zhang
Summary: Lanthanides doped luminescent materials are crucial in lighting and display techniques. However, the local structure and composition changes induced by doping are not well understood. This study used advanced electron microscopy techniques to reveal the atomic-level structure and composition of Ce3+ doped CaYAlO4, showing significant microstructural and compositional inhomogeneities.
Article
Microscopy
Fengshan Zheng, Marco Beleggia, Vadim Migunov, Giulio Pozzi, Rafal E. Dunin-Borkowski
Summary: This study used off-axis electron holography to investigate electron-beam-induced charging of an insulating Al2O3 nanotip on a conducting support. The study found that specimen temperature affects the reproducibility of charge density measurements and both positively and negatively charged regions exist in closely adjacent parts of the specimen.
Article
Chemistry, Physical
Dong Wang, Yi Li, Liangsong Wen, Jiangbo Xi, Pei Liu, Thomas Willum Hansen, Ping Li
Summary: This study reports the synthesis of Ni-Pd/Fe3O4 composite nanospheres by incorporating heterometals into Fe3O4 shell and yolk, which exhibit excellent treatment efficiency and capability for the degradation of N-containing organic dyes. The as-prepared composite shows enhanced catalytic activity and recyclability compared to its mono metal counterparts. In addition, it demonstrates superior catalytic activity in the reduction of 4-nitrophenol. This work provides a new strategy to enhance the activity of iron oxide-based catalytic materials and contributes to environmental catalysis research.
Article
Chemistry, Physical
Jie Huang, Xiaozhi Li, Rui-Hong Xie, Xinglong Tan, Jiangbo Xi, Fan Tian, Pei Liu, Thomas Willum Hansen, Zheng-Wu Bai
Summary: This study reports a facile and practical method to anchor atomically dispersed Pd on an N-doped holey carbon nanotube (Pd/NHCNT) by efficiently strengthening metal-support interaction. The Pd/NHCNT catalyst shows remarkable activity for nitroarenes hydrogenation with a turnover frequency as high as 1091.49 min-1, surpassing noble metal-based catalysts. The defect-induced anchoring approach provides a new avenue for designing other highly active atomic metal catalysts with high metal dispersion.
APPLIED SURFACE SCIENCE
(2023)
Article
Biophysics
Xiyuan Liu, Andrew J. Whalen, Kayeon Kim, Changsi Cai, Martin Lauritzen, Nicolas Bertram, Bingdong Chang, Tianbo Yu, Anpan Han, Seung Woo, Shelley I. Fried
Summary: Micro-coil magnetic stimulation of brain tissue poses challenges for MEMS micro-coil probe fabrication, including low coil resistance, low leak current, and adaptive process technology. We propose a fabrication process that utilizes multilayer resist lift-off, encapsulation of micro-coil Al wires, and a combination of DRIE process and maskless photolithography. The resulting probes are validated in vivo using mice and show improvements compared to previous work.
BIOSENSORS & BIOELECTRONICS
(2023)
Article
Engineering, Electrical & Electronic
Bima Nugraha Sanusi, Mathias Zambach, Cathrine Frandsen, Marco Beleggia, Anders Jorgensen, Ziwei Ouyang
Summary: This article investigates the behavior of core losses in ferrite under high frequency (MHz range) with superimposed dc bias. The measurement circuit utilizes an inductive compensation method to reduce sensitivity to phase errors and proposes an additional circuit for easier dc bias generation. The measurement results analyze the controlling parameters of excitation frequency, peak ac flux density, and dc bias and reveal several important findings, including the influence of dc bias on losses and the relationship between frequency and losses increase. Finally, an improved core loss prediction model is created using an improved Steinmetz Premagnetization Graph and artificial neural network for use by other magnetics designers.
IEEE TRANSACTIONS ON POWER ELECTRONICS
(2023)
Article
Engineering, Electrical & Electronic
Hoa Thanh Le, Yasser Nour, Flemming Jensen, Arnold Knott, Anpan Han, Ziwei Ouyang
Summary: Future generations of power converters need to be miniaturized for smaller and smarter electronic devices. Monolithic integration using power interposer technology (PIT) addresses gaps in packaging and integrated inductor technology. A step-down power converter using PIT demonstrates high efficiency and power density. The commercial potential of PIT for integrated power converters is significant.
IEEE TRANSACTIONS ON POWER ELECTRONICS
(2023)
Article
Chemistry, Multidisciplinary
Peng-Peng Yang, Xiao-Long Zhang, Pei Liu, Daniel J. Kelly, Zhuang-Zhuang Niu, Yan Kong, Lei Shi, Ya-Rong Zheng, Ming-Hui Fan, Hui-Juan Wang, Min-Rui Gao
Summary: A dual-phase copper-based catalyst with abundant Cu(I) sites at the amorphous-nanocrystalline interfaces has been developed to improve CO-CO coupling kinetics for efficient multicarbon production from CO2 reduction. This catalyst design strategy enables a high Faradaic efficiency of 81% and a partial current density of 322 milliamperes per square centimeter in a neutral potassium chloride electrolyte. The catalyst remains stable after 45 hours of operation at commercially relevant current densities for CO2 electrolysis (300 mA per square centimeter).
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
(2023)
Article
Engineering, Electrical & Electronic
Bingdong Chang, Xiyuan Liu, Nicolas Bertram, Anpan Han
Summary: Microelectromechanical systems for biological purposes (BioMEMS) have great potential in diagnostics, medical treatment, and enhancing body functions. However, the integration of biocompatible polymeric materials with standard fabrication processes in semiconductor industries is challenging. In this study, we demonstrate various micromachining techniques of plasmapolymerized fluorocarbon (PPFC), a feasible polymeric material acquired by plasma etching systems. PPFC is compatible with standard fabrication techniques and allows functionalization for BioMEMS devices. Flexible free-standing microelectrode arrays were successfully fabricated using PPFC. We expect PPFC-based platforms to be strong candidates for developing various BioMEMS devices.
MICRO AND NANO ENGINEERING
(2023)
Article
Engineering, Electrical & Electronic
Rubaiyet I. Haque, Affan Kaysa Waafi, Bingdong Chang, Anpan Han
Summary: Ice lithography (IL) is used to fabricate 2D and 3D patterns by utilizing the electron-solid interaction principle. In this study, we demonstrate the IL patterning of negative tone metalorganic precursor. The precursor is condensed at 80 K and patterned using a 5-20 keV electron beam. The results show that the IL patterned tungsten hexacarbonyl exhibits oxidized tungsten embedded in carbon and oxygen matrix.
MICRO AND NANO ENGINEERING
(2023)
Article
Nanoscience & Nanotechnology
Azin Ziashahabi, Anna Elsukova, Sara Nilsson, Marco Beleggia, Peter Stanley Jorgensen, Christoph Langhammer, Shima Kadkhodazadeh
Summary: We examined how high-energy electron irradiation affects the oxidation of copper nanoparticles using environmental scanning transmission electron microscopy (ESTEM). The particles were oxidized in 3 mbar of O-2 at temperatures ranging from 100 to 200 °C, and their evolution was observed in situ with sub-nanometer spatial resolution. Oxidation resulted in the formation of outer and inner oxide shells on the nanoparticles, facilitated by the diffusion of copper and oxygen. Our findings indicate that the electron beam actively influences the oxidation process, accelerating it compared to oxidation without electron beam exposure. However, this electron beam-assisted acceleration diminishes at higher temperatures. Additionally, the electron beam appears to hinder the oxidation through the inward diffusion of O2- anions while enhancing oxidation through the outward diffusion of Cu+ cations.
ACS NANOSCIENCE AU
(2023)
Article
Chemistry, Physical
Yalong Zhai, Xuewei Yang, Shu-Na Zhao, Pei Liu, Jun Lin, Yang Zhang
Summary: In this study, advanced electron microscopy techniques were used to reveal the atomic resolution crystal and chemical structure of Ce3+ doped CaYAlO4. The results showed substantial microstructural and compositional inhomogeneities, as well as the presence of Ce dopant clustering and Ce3+/Ce4+ valence variation.
Article
Engineering, Electrical & Electronic
Rubaiyet Haque, Affan K. Waafi, Kim Jaemin, Danick Briand, Anpan Han
Summary: This article presents the design and development of a cryogenic system for ice lithography. The system features embedded channels for direct liquid nitrogen flow, allowing for fast cooling and low sample temperature. Compared to previous designs, the new system significantly reduces cooling time and achieves a lower temperature, increasing efficiency. The lower stage temperature also enables the exploration of new precursors, materials, and applications, as demonstrated by combining ice lithography with printed flexible electronics technology.
MICRO AND NANO ENGINEERING
(2022)
