Single-atom fabrication with electron and ion beams: From surfaces and two-dimensional materials toward three-dimensional atom-by-atom assembly
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Title
Single-atom fabrication with electron and ion beams: From surfaces and two-dimensional materials toward three-dimensional atom-by-atom assembly
Authors
Keywords
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Journal
MRS BULLETIN
Volume 42, Issue 09, Pages 637-643
Publisher
Cambridge University Press (CUP)
Online
2017-09-08
DOI
10.1557/mrs.2017.186
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