Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 171, Issue 2, Pages 370-374Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.08.025
Keywords
Static pull-in; Modified couple stress theory; Size effects
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This paper investigates the deflection and static pull-in voltage of microcantilevers based on the modified couple stress theory, a non-classic continuum theory capable to predict the size effects for structures in micron and sub-micron scales. It is shown that the couple stress theory can remove the gap between the experimental observations and the classical theory based simulations for the static pull-in voltage. (C) 2011 Elsevier B.V. All rights reserved.
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