An Integrated Thermal Compensation System for MEMS Inertial Sensors

Published 2014 View Full Article

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Title
An Integrated Thermal Compensation System for MEMS Inertial Sensors
Authors
Keywords
-
Journal
SENSORS
Volume 14, Issue 3, Pages 4290-4311
Publisher
MDPI AG
Online
2014-03-05
DOI
10.3390/s140304290
References
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