Accurate Removal of Implanted Gallium and Amorphous Damage from TEM Specimens after Focused Ion Beam (FIB) Preparation

Published 2017 View Full Article

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Title
Accurate Removal of Implanted Gallium and Amorphous Damage from TEM Specimens after Focused Ion Beam (FIB) Preparation
Authors
Keywords
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Journal
MICROSCOPY AND MICROANALYSIS
Volume 23, Issue S1, Pages 300-301
Publisher
Cambridge University Press (CUP)
Online
2017-08-09
DOI
10.1017/s1431927617002185
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