A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor

Published 2017 View Full Article

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Title
A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor
Authors
Keywords
Flexible, Capacitive pressure sensor, PDMS, Micro-pores, Dielectric layer, 3D printer
Journal
MICROELECTRONIC ENGINEERING
Volume 179, Issue -, Pages 60-66
Publisher
Elsevier BV
Online
2017-04-29
DOI
10.1016/j.mee.2017.04.028

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