A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor

标题
A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor
作者
关键词
Flexible, Capacitive pressure sensor, PDMS, Micro-pores, Dielectric layer, 3D printer
出版物
MICROELECTRONIC ENGINEERING
Volume 179, Issue -, Pages 60-66
出版商
Elsevier BV
发表日期
2017-04-29
DOI
10.1016/j.mee.2017.04.028

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