Microfabrication of hybrid structure composed of rigid silicon and flexible PI membranes

Published 2017 View Full Article

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Title
Microfabrication of hybrid structure composed of rigid silicon and flexible PI membranes
Authors
Keywords
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Journal
Micro & Nano Letters
Volume 12, Issue 11, Pages 913-915
Publisher
Institution of Engineering and Technology (IET)
Online
2017-09-08
DOI
10.1049/mnl.2017.0428

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