Microfabrication of hybrid structure composed of rigid silicon and flexible PI membranes

标题
Microfabrication of hybrid structure composed of rigid silicon and flexible PI membranes
作者
关键词
-
出版物
Micro & Nano Letters
Volume 12, Issue 11, Pages 913-915
出版商
Institution of Engineering and Technology (IET)
发表日期
2017-09-08
DOI
10.1049/mnl.2017.0428

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