Microstructures of chemical vapor deposited high-purity tungsten achieved by two different precursors

Published 2017 View Full Article

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Title
Microstructures of chemical vapor deposited high-purity tungsten achieved by two different precursors
Authors
Keywords
CVD high-purity tungsten, Microstructures, Preferred orientation, Surface morphology
Journal
MATERIALS CHARACTERIZATION
Volume 134, Issue -, Pages 1-8
Publisher
Elsevier BV
Online
2017-10-11
DOI
10.1016/j.matchar.2017.10.007

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