Room temperature TiO2 atomic layer deposition on collagen membrane from a titanium alkylamide precursor

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Title
Room temperature TiO2 atomic layer deposition on collagen membrane from a titanium alkylamide precursor
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 1, Pages 01B134
Publisher
American Vacuum Society
Online
2016-12-26
DOI
10.1116/1.4972245

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