Room temperature TiO2 atomic layer deposition on collagen membrane from a titanium alkylamide precursor

标题
Room temperature TiO2 atomic layer deposition on collagen membrane from a titanium alkylamide precursor
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 1, Pages 01B134
出版商
American Vacuum Society
发表日期
2016-12-26
DOI
10.1116/1.4972245

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