Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries

Title
Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 1, Pages 01B137
Publisher
American Vacuum Society
Online
2016-12-26
DOI
10.1116/1.4972554

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