Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries

标题
Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 1, Pages 01B137
出版商
American Vacuum Society
发表日期
2016-12-26
DOI
10.1116/1.4972554

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