Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

Published 2015 View Full Article

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Title
Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology
Authors
Keywords
Nanocrystalline diamond films, Scaling, Growth dynamics, Roughness, Atomic force microscopy
Journal
DIAMOND AND RELATED MATERIALS
Volume 58, Issue -, Pages 172-179
Publisher
Elsevier BV
Online
2015-08-01
DOI
10.1016/j.diamond.2015.07.002

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