Thermal etching of nanocrystalline diamond films

Published 2015 View Full Article

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Title
Thermal etching of nanocrystalline diamond films
Authors
Keywords
Diamond film, Nanocrystalline, Etching, Oxidation, High power electronics, Electronic device structures
Journal
DIAMOND AND RELATED MATERIALS
Volume 59, Issue -, Pages 116-121
Publisher
Elsevier BV
Online
2015-10-02
DOI
10.1016/j.diamond.2015.09.017

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