Thermal etching of nanocrystalline diamond films

标题

作者

关键词

Diamond film, Nanocrystalline, Etching, Oxidation, High power electronics, Electronic device structures

出版物

Volume 59, Issue -, Pages 116-121

出版商

Elsevier BV

发表日期

2015-10-02

DOI

10.1016/j.diamond.2015.09.017

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