Fabrication of ultrahigh aspect ratio silicon nanostructures using self-assembled gold metal-assisted chemical etching

Published 2017 View Full Article

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Title
Fabrication of ultrahigh aspect ratio silicon nanostructures using self-assembled gold metal-assisted chemical etching
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 16, Issue 1, Pages 014502
Publisher
SPIE-Intl Soc Optical Eng
Online
2017-02-02
DOI
10.1117/1.jmm.16.1.014502

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