Nearest neighbor difference rule-based kernel principal component analysis for fault detection in semiconductor manufacturing processes

Fault Detection Using Random Projections and k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

(2015) Zhe Zhou et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

New fault detection method based on reduced kernel principal component analysis (RKPCA)

(2015) Okba Taouali et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

New bandwidth selection criterion for Kernel PCA: Approach to dimensionality reduction and classification problems

(2014) Minta Thomas et al.   BMC BIOINFORMATICS

Diffusion maps based k-nearest-neighbor rule technique for semiconductor manufacturing process fault detection

(2014) Yuan Li et al.   CHEMOMETRICS AND INTELLIGENT LABORATORY SYSTEMS

Fault Detection and Classification in Plasma Etch Equipment for Semiconductor Manufacturing $e$-Diagnostics

(2011) Sang Jeen Hong et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Statistics pattern analysis: A new process monitoring framework and its application to semiconductor batch processes

(2010) Q. Peter He et al.   AICHE JOURNAL

Large-Scale Semiconductor Process Fault Detection Using a Fast Pattern Recognition-Based Method

(2010) Qinghua Peter He et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Multivariate SPC for recipe preservation of batch processes

(2009) Young-il Kim et al.   QUALITY AND RELIABILITY ENGINEERING INTERNATIONAL