Elemental evolution of the SiOxFy self-masking layer of plasma textured silicon and its modification during air exposure

Title
Elemental evolution of the SiOxFy self-masking layer of plasma textured silicon and its modification during air exposure
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 121, Issue 6, Pages 063301
Publisher
AIP Publishing
Online
2017-02-09
DOI
10.1063/1.4976007

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