Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas

(2017) Andrew Robert Gibson et al.   PLASMA PHYSICS AND CONTROLLED FUSION

Fast, downstream removal of photoresist using reactive oxygen species from the effluent of an atmospheric pressure plasma Jet

(2016) A West et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect

(2015) Edmund Schüngel et al.   APPLIED PHYSICS LETTERS

Tailoring the nonlinear frequency coupling between odd harmonics for the optimisation of charged particle dynamics in capacitively coupled oxygen plasmas

(2015) A. R. Gibson et al.   APPLIED PHYSICS LETTERS

The pressure dependence of the discharge properties in a capacitively coupled oxygen discharge

(2015) J. T. Gudmundsson et al.   JOURNAL OF APPLIED PHYSICS

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

(2015) Bastien Bruneau et al.   PHYSICAL REVIEW LETTERS

Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma

(2015) Arthur Greb et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Spatially resolved Langmuir probe diagnostics in a capacitively coupled radio frequency argon and oxygen plasma

(2015) C Küllig et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Highly vibrationally excited O2molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy

(2015) Mickaël Foucher et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

(2015) T Lafleur   PLASMA SOURCES SCIENCE & TECHNOLOGY

Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

(2014) Arthur Greb et al.   APPLIED PHYSICS LETTERS

Modelling of laser ablation and reactive oxygen plasmas for pulsed laser deposition of zinc oxide

(2014) S. Rajendiran et al.   SURFACE & COATINGS TECHNOLOGY

The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations

(2013) Arthur Greb et al.   APPLIED PHYSICS LETTERS

Absolute atomic oxygen and nitrogen densities in radio-frequency driven atmospheric pressure cold plasmas: Synchrotron vacuum ultra-violet high-resolution Fourier-transform absorption measurements

(2013) K. Niemi et al.   APPLIED PHYSICS LETTERS

Use of particle-in-cell simulations to improve the actinometry technique for determination of absolute atomic oxygen density

(2013) J Conway et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads

(2013) T. Lafleur et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Electron and negative ion dynamics in electronegative cc-rf plasmas

(2012) K Dittmann et al.   PLASMA PHYSICS AND CONTROLLED FUSION

Discharge kinetics of inductively coupled oxygen plasmas: experiment and model

(2012) C S Corr et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

(2010) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

(2010) T Gans et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas

(2010) Luc Stafford et al.   PURE AND APPLIED CHEMISTRY

Diagnostic based modeling for determining absolute atomic oxygen densities in atmospheric pressure helium-oxygen plasmas

(2009) K. Niemi et al.   APPLIED PHYSICS LETTERS

Effect of Cu contamination on recombination of O atoms on a plasma-oxidized silicon surface

(2009) Joydeep Guha et al.   JOURNAL OF APPLIED PHYSICS

Absolute atomic oxygen density distributions in the effluent of a microscale atmospheric pressure plasma jet

(2008) N Knake et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Seasoning of plasma etching reactors: Ion energy distributions to walls and real-time and run-to-run control strategies

(2008) Ankur Agarwal et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A