Self-generated microcracks in an ultra-thin AlN/GaN superlattice interlayer and their influences on the GaN epilayer grown on Si(110) substrates by metal–organic chemical vapor deposition

Title
Self-generated microcracks in an ultra-thin AlN/GaN superlattice interlayer and their influences on the GaN epilayer grown on Si(110) substrates by metal–organic chemical vapor deposition
Authors
Keywords
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Journal
CRYSTENGCOMM
Volume 17, Issue 27, Pages 5014-5018
Publisher
Royal Society of Chemistry (RSC)
Online
2015-05-27
DOI
10.1039/c5ce00929d

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