Engineering the Growth of MoS2via Atomic Layer Deposition of Molybdenum Oxide Film Precursor
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Title
Engineering the Growth of MoS2via Atomic Layer Deposition of Molybdenum Oxide Film Precursor
Authors
Keywords
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Journal
Advanced Electronic Materials
Volume 2, Issue 10, Pages 1600330
Publisher
Wiley
Online
2016-09-19
DOI
10.1002/aelm.201600330
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