Integrated on-chip energy storage using passivated nanoporous-silicon electrochemical capacitors

Published 2016 View Full Article

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Title
Integrated on-chip energy storage using passivated nanoporous-silicon electrochemical capacitors
Authors
Keywords
Porous silicon, Atomic layer deposition, Carbonization, Electrochemical capacitors
Journal
Nano Energy
Volume 25, Issue -, Pages 68-79
Publisher
Elsevier BV
Online
2016-04-14
DOI
10.1016/j.nanoen.2016.04.016

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