期刊
NANO ENERGY
卷 25, 期 -, 页码 68-79出版社
ELSEVIER
DOI: 10.1016/j.nanoen.2016.04.016
关键词
Porous silicon; Atomic layer deposition; Carbonization; Electrochemical capacitors
类别
资金
- National Science Foundation (NSF) [1506640, 1509735]
- NERC ASSIST
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [1506640] Funding Source: National Science Foundation
Integrated on-chip energy storage is increasingly important in the fields of internet of things, energy harvesting, sensing, and wearables; capacitors being ideal for devices requiring higher powers or many thousands of cycles. This work demonstrates electrochemical capacitors fabricated using an electrolyte and porous silicon nanostructures with very high surface-to-volume ratios. Nanopore morphologies and passivation coatings for maximizing energy and power densities of porous-silicon based electrochemical capacitors are studied. Stability is achieved through atomic layer deposition (ALD) titanium nitride or chemical vapor deposition (CVD) carbon coatings. The use of silicon processing methods creates the potential for on-chip energy storage. (C) 2016 Elsevier Ltd. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据