Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
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Title
Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
Authors
Keywords
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Journal
AIP Advances
Volume 6, Issue 6, Pages 065004
Publisher
AIP Publishing
Online
2016-06-08
DOI
10.1063/1.4953805
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- (2008) A M Jayich et al. NEW JOURNAL OF PHYSICS
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