Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
出版年份 2016 全文链接
标题
Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
作者
关键词
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出版物
AIP Advances
Volume 6, Issue 6, Pages 065004
出版商
AIP Publishing
发表日期
2016-06-08
DOI
10.1063/1.4953805
参考文献
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