Dry etching and residue removal of functional polymer mixed with TiO2 microparticles via inductively coupled CF4/O2 plasma and ultrasonic-treated acetone for humidity sensor application

Aerosol deposition-based micropatterning of barium titanate via sulphur hexafluoride inductively coupled plasma etching

(2015) C. Wang et al.   VACUUM

Microwave-Plasma Dry-Etch for Fabrication of Conducting Polymer Microelectrodes

(2014) Richard F. Vreeland et al.   ANALYTICAL CHEMISTRY

Defined micropatterns of platinum thin films by inductively coupled plasma etching using SF6/Ar/O2 mixture gas

(2014) Zhao Yao et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Prepare dispersed CIS nano-scale particles and spray coating CIS absorber layers using nano-scale precursors

(2014) Jian-Chiun Liou et al.   Nanoscale Research Letters

Fabrication of planar nanofluidic channels in thermoplastic polymers by O2 plasma etching

(2012) Junshan Liu et al.   Micro & Nano Letters

Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate

(2011) Xinhong Yu et al.   APPLIED SURFACE SCIENCE

Capacitive humidity sensors based on large diameter porous alumina prepared by high current anodization

(2011) M. Almasi Kashi et al.   SENSORS AND ACTUATORS A-PHYSICAL

Dry Etching of Germanium Using Inductively Coupled Ar/CCl2F2 /Cl2 Plasma

(2010) Taek Sung Kim et al.   Electronic Materials Letters