Influence of silicon crystal orientation on piezoelectric textured aluminium nitride deposited on metal electrodes

标题
Influence of silicon crystal orientation on piezoelectric textured aluminium nitride deposited on metal electrodes
作者
关键词
Crystal orientation, Aluminium nitride, Piezoelectrics, Sputtering
出版物
VACUUM
Volume 132, Issue -, Pages 47-52
出版商
Elsevier BV
发表日期
2016-07-26
DOI
10.1016/j.vacuum.2016.07.019

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