Reactive magnetron sputtering of Nb-doped TiO 2 films: Relationships between structure, composition and electrical properties

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Title
Reactive magnetron sputtering of Nb-doped TiO 2 films: Relationships between structure, composition and electrical properties
Authors
Keywords
TiO:Nb, Reactive sputtering, Anatase, TCO, Structure, Hall mobility, EBSD, Raman
Journal
THIN SOLID FILMS
Volume 605, Issue -, Pages 44-52
Publisher
Elsevier BV
Online
2015-12-02
DOI
10.1016/j.tsf.2015.11.058

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