Reactive magnetron sputtering of Nb-doped TiO 2 films: Relationships between structure, composition and electrical properties

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标题

作者

关键词

TiO:Nb, Reactive sputtering, Anatase, TCO, Structure, Hall mobility, EBSD, Raman

出版物

THIN SOLID FILMS

Volume 605, Issue -, Pages 44-52

出版商

Elsevier BV

发表日期

2015-12-02

DOI

10.1016/j.tsf.2015.11.058

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