Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study

Published 2016 View Full Article

Authors

Keywords

Diamond like carbon (DLC), Fe-doped DLC, N-doped DLC, Si-doped DLC

Journal

THIN SOLID FILMS

Volume 610, Issue -, Pages 42-47

Publisher

Elsevier BV

Online

2016-05-04

DOI

10.1016/j.tsf.2016.04.048

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