Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Published 2016 View Full Article

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Title
Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment
Authors
Keywords
Sputter deposition, Multilayers, Immiscible materials, Cu, Ta
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 302, Issue -, Pages 284-292
Publisher
Elsevier BV
Online
2016-06-17
DOI
10.1016/j.surfcoat.2016.06.024

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