Journal
SURFACE & COATINGS TECHNOLOGY
Volume 293, Issue -, Pages 35-41Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2016.01.037
Keywords
HIPIMS; CrN; Microstructure; Corrosion; a-C:H; DLC
Funding
- Arbeitsgemeinschaft Industrieller Forschungsvereinigungen Otto von Guericke e.V (AiF) through the ZIM program of the Bundesministerium fur Wirtschaft und Energie (BMWi) [KF2198619TA3]
- Bundesministerium fur Wirtschaft und Energie (BMWi) [03ET1072B POSEIDON]
- AiF
- BMWi
- Arbeitsgemeinschaft Industrieller Forschungsvereinigungen Otto von Guericke e.V (AiF) through the IGF program [16708N]
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Chromium nitride (CrNx) films are frequently used as interlayers to enhance the adhesion of hydrogenated amorphous carbon (a-C:H) films on steel substrates. The microstructure of these CrNx interlayers has a direct influence on the corrosion protection properties of the a-C:H films. A dense and defect-free microstructure can improve the corrosion resistance. In this study, chromium nitride (CrNx) films were optimized by high power impulse magnetron sputtering (HiPIMS) in order to reduce the film defect density. The HiPIMS-CrNx films were deposited on polished AISI 52100 (100Cr6) steel shims with a hardness of 60 +/- 2 HRC using a Cemecon CC800 (R)/9 HiPIMS device. The influence of the cathode pulse duration, cathode frequency and bias pulse duration on the deposition rate, nitrogen content, phase composition, microstructure and mechanical properties of CrN films were investigated by glow discharge optical emission spectroscopy (GDOES), X-ray diffraction (XRD), electron microscopy and microhardness measurements. Additionally, the corrosion resistance of HiPIMS-CrNx/a-C:H-coated 100Cr6 steel shims was tested by neutral salt spray test. For lower duty cycles an enhanced corrosion protection was observed due to a densification of the CrNx film microstructure and a decrease of the film defect density. (C) 2016 Elsevier B.V. All rights reserved.
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